Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy.

This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale.

• Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques
• Compares a variety of electro-fabrication techniques, outlining which is best in different situations
• Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM