Lithography
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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| UPC | 9781118621233 |
|---|---|
| Author | Stefan Landis |
| Pages | 320 |
| Language | English |
| Format | |
| Publisher | Wiley |
| SKU | 9781118621233 |
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