Electron Probe Microanalysis presents a collection of reviews on various aspects of electron probe microanalysis. This book discusses the model for quantitative electron probe analysis. Organized into 14 chapters, this book begins with an overview of the various kinds of microanalysis followed by a discussion of the advantages that can be derived from using the electron probe method. This text then examines the various applications of backscattered electron and specimen current methods for quantitative analysis. Other chapters consider the fundamental concepts for quantitative electron probe microanalysis utilizing pure elements as standards. This book discusses as well the absolute method of quantitative chemical analysis by emission X-ray spectroscopy. The final chapter deals with the main advantage of the Kossel technique in the study of the thermodynamic and mechanical characteristics of crystals. This book is a valuable resource for scientists and research workers. Non-specialists who need information on this excellent analytical tool will also find this book useful.